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A hollow cathode discharge modification as a source of sput..:

Zhechev, D. ; Zhemenik, V.I. ; Tileva, S...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  204 (2003)  - p. 387-391 , 2003
Link: https://doi.org/10.1016/s0168-583x(02)01996-1