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Aluminum plasma immersion ion implantation in polymers:

Ueda, M. ; Tan, I.H. ; Dallaqua, R.S....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  206 (2003)  - p. 760-766 , 2003
Link: https://doi.org/10.1016/s0168-583x(03)00844-9