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Ion beam characterization and engineering of strain in semi..:

Nageswara Rao, S.V.S ; Pathak, Anand P ; Siddiqui, Azher M...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  212 (2003)  - p. 442-450 , 2003
Link: https://doi.org/10.1016/s0168-583x(03)01719-1