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Extension of the model for Ar+ ion induced etching of Si by..:

van Veen, G.N.A. ; Sanders, F.H.M. ; Dieleman, J....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  19-20 (1987)  - p. 1022-1025 , 1987
Link: https://doi.org/10.1016/s0168-583x(87)80203-3