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Blister formation in silicon films during ion beam assisted..:

Liu, C.H. ; He, Yuan-Jin ; Li, Wen-Zhi.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  122 (1997)  2 - p. 229-232 , 1997
Link: https://doi.org/10.1016/s0168-583x(96)00711-2