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Annealing studies of B+ implanted 6HSiC by RBS and optical..:

Wendler, E. ; Heft, A. ; Wesch, W...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  127-128 (1997)  - p. 341-346 , 1997
Link: https://doi.org/10.1016/s0168-583x(96)00953-6