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Ion implantation in 6HSiC:

Rao, M.V. ; Nordstrom, D. ; Gardner, J.A....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  127-128 (1997)  - p. 655-659 , 1997
Link: https://doi.org/10.1016/s0168-583x(96)01147-0