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High energy implantation with high-charge-state ions in a v..:

Oks, E.M. ; Anders, A. ; Brown, I.G...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  127-128 (1997)  - p. 779-781 , 1997
Link: https://doi.org/10.1016/s0168-583x(97)00006-2