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He+ beam induced damage of silicon carbide studied by vibra..:

Hobert, H. ; Dunken, H. ; Seifert, F....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  129 (1997)  2 - p. 244-249 , 1997
Link: https://doi.org/10.1016/s0168-583x(97)00205-x