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A sputtering calculation: Angular dependence of sputtering ..:

Zhengming, Luo ; Qing, Hou ; Lijian, Teng
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  135 (1998)  1-4 - p. 149-153 , 1998
Link: https://doi.org/10.1016/s0168-583x(97)00590-9