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Studies of the near-surface layers of silicon crystals impl..:

Żymierska, D. ; Klinger, D. ; Auleytner, J...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  146 (1998)  1-4 - p. 350-355 , 1998
Link: https://doi.org/10.1016/s0168-583x(98)00472-8