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Radiation damage–He interaction in He implanted Si during b..:

Raineri, V. ; Coffa, S. ; Saggio, M...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  147 (1999)  1-4 - p. 292-297 , 1999
Link: https://doi.org/10.1016/s0168-583x(98)00609-0