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Effects of environment on annealing behavior of In+ implant..:

Xie, Dong-Zhu ; Zhu, De-Zhang ; Cao, De-Xin...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  134 (1998)  1 - p. 22-26 , 1998
Link: https://doi.org/10.1016/s0168-583x(98)80029-3