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Formation of cavities in GaAs and InGaAs:

Follstaedt, D.M. ; Myers, S.M. ; Barbour, J.C....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  160 (2000)  4 - p. 476-498 , 2000
Link: https://doi.org/10.1016/s0168-583x(99)00618-7