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Influence of oxygen ion implantation on the damage and anne..:

McHargue, Carl J ; Hunn, John D ; Alves, E..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  166-167 (2000)  - p. 188-192 , 2000
Link: https://doi.org/10.1016/s0168-583x(99)00657-6