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Determination of the carbon depth profiles of Si112Cx13Cy l..:

Link, F. ; Baumann, H. ; Bethge, K.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  161-163 (2000)  - p. 1095-1098 , 2000
Link: https://doi.org/10.1016/s0168-583x(99)00993-3