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Parasitic capacitances in thick-substrate silicon microstri..:

Passeri, D ; Ciampolini, P ; Bilei, G.M.
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.  476 (2002)  3 - p. 751-757 , 2002
Link: https://doi.org/10.1016/s0168-9002(01)01669-2