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Analysis of trace metals in thin silicon nitride films by t..:

Vereecke, G. ; Arnauts, S. ; Van Doorne, P....
Spectrochimica Acta Part B: Atomic Spectroscopy.  56 (2001)  11 - p. 2321-2330 , 2001
Link: https://doi.org/10.1016/s0584-8547(01)00311-1