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1 Ergebnisse
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High etching rate of GaN films by KrF excimer laser:
Chu, Chen-Fu
;
Lee, C.K
;
Yu, C.C
...
Materials Science and Engineering: B. 82 (2001) 1-3 - p. 42-44 , 2001
Link:
https://doi.org/10.1016/s0921-5107(00)00696-6
RT Journal T1 <Title>High etching rate of GaN films by KrF excimer laser</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0921-5107(00)00696-6&Exemplar=1&LAN=DE A1 Chu, Chen-Fu A1 Lee, C.K A1 Yu, C.C A1 Wang, Y.K A1 Tasi, J.Y A1 Yang, C.R A1 Wang, S.C PB Elsevier BV YR 2001 SN 0921-5107 JF Materials Science and Engineering: B VO 82 IS 1-3 SP 42 OP 44 LK http://dx.doi.org/https://doi.org/10.1016/s0921-5107(00)00696-6 DO https://doi.org/10.1016/s0921-5107(00)00696-6 SF ELIB - SuUB Bremen
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