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1 Ergebnisse
1
The technology combined electrochemical mechanical polishin:
Chen, Yuan-Long
;
Zhu, Shu-Min
;
Lee, Shuo-Jen
.
Journal of Materials Processing Technology. 140 (2003) 1-3 - p. 203-205 , 2003
Link:
https://doi.org/10.1016/s0924-0136(03)00826-4
RT Journal T1 <Title>The technology combined electrochemical mechanical polishing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0924-0136(03)00826-4&Exemplar=1&LAN=DE A1 Chen, Yuan-Long A1 Zhu, Shu-Min A1 Lee, Shuo-Jen A1 Wang, Jong C PB Elsevier BV YR 2003 SN 0924-0136 JF Journal of Materials Processing Technology VO 140 IS 1-3 SP 203 OP 205 LK http://dx.doi.org/https://doi.org/10.1016/s0924-0136(03)00826-4 DO https://doi.org/10.1016/s0924-0136(03)00826-4 SF ELIB - SuUB Bremen
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