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Performance of GaAs micromachined microactuator:

Lalinský, T. ; Burian, E. ; Drz̆ı́k, M....
Sensors and Actuators A: Physical.  85 (2000)  1-3 - p. 365-370 , 2000
Link: https://doi.org/10.1016/s0924-4247(00)00378-2