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1 Ergebnisse
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Fabrication planar coil on oxide membrane hollowed with por..:
Zewen Liu
;
Yong Ding
;
Litian Liu
.
Sensors and Actuators A: Physical. 108 (2003) 1-3 - p. 112-116 , 2003
Link:
https://doi.org/10.1016/s0924-4247(03)00377-7
RT Journal T1 <Title>Fabrication planar coil on oxide membrane hollowed with porous silicon as sacrificial layer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0924-4247(03)00377-7&Exemplar=1&LAN=DE A1 Zewen Liu A1 Yong Ding A1 Litian Liu A1 Zhijian Li PB Elsevier BV YR 2003 SN 0924-4247 JF Sensors and Actuators A: Physical VO 108 IS 1-3 SP 112 OP 116 LK http://dx.doi.org/https://doi.org/10.1016/s0924-4247(03)00377-7 DO https://doi.org/10.1016/s0924-4247(03)00377-7 SF ELIB - SuUB Bremen
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