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1 Ergebnisse
1
Design and fabrication of micromirror array supported by ve..:
Shin, Jong-Woo
;
Chung, Seok-Whan
;
Kim, Yong-Kweon
.
Sensors and Actuators A: Physical. 66 (1998) 1-3 - p. 144-149 , 1998
Link:
https://doi.org/10.1016/s0924-4247(97)01762-7
RT Journal T1
Design and fabrication of micromirror array supported by vertical springs
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0924-4247(97)01762-7&Exemplar=1&LAN=DE A1 Shin, Jong-Woo A1 Chung, Seok-Whan A1 Kim, Yong-Kweon A1 Choi, Bum Kyoo PB Elsevier BV YR 1998 SN 0924-4247 JF Sensors and Actuators A: Physical VO 66 IS 1-3 SP 144 OP 149 LK http://dx.doi.org/https://doi.org/10.1016/s0924-4247(97)01762-7 DO https://doi.org/10.1016/s0924-4247(97)01762-7 SF ELIB - SuUB Bremen
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