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VLSI-NEMS chip for parallel AFM data storage:
Despont, M.
;
Brugger, J.
;
Drechsler, U.
...
Sensors and Actuators A: Physical. 80 (2000) 2 - p. 100-107 , 2000
Link:
https://doi.org/10.1016/s0924-4247(99)00254-x
RT Journal T1 <Title>VLSI-NEMS chip for parallel AFM data storage</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0924-4247(99)00254-x&Exemplar=1&LAN=DE A1 Despont, M. A1 Brugger, J. A1 Drechsler, U. A1 Dürig, U. A1 Häberle, W. A1 Lutwyche, M. A1 Rothuizen, H. A1 Stutz, R. A1 Widmer, R. A1 Binnig, G. A1 Rohrer, H. A1 Vettiger, P. PB Elsevier BV YR 2000 SN 0924-4247 JF Sensors and Actuators A: Physical VO 80 IS 2 SP 100 OP 107 LK http://dx.doi.org/https://doi.org/10.1016/s0924-4247(99)00254-x DO https://doi.org/10.1016/s0924-4247(99)00254-x SF ELIB - SuUB Bremen
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