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Atomic-layer chemical vapor deposition of SnO2 for gas-sens..:

Rosental, A ; Tarre, A ; Gerst, A..
Sensors and Actuators B: Chemical.  77 (2001)  1-2 - p. 297-300 , 2001
Link: https://doi.org/10.1016/s0925-4005(01)00746-8