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2.5 kV ion-implanted p+ n diodes in 6H-SiC:

Rottner, K.H. ; Schöner, A. ; Savage, S.M....
Diamond and Related Materials.  6 (1997)  10 - p. 1485-1488 , 1997
Link: https://doi.org/10.1016/s0925-9635(97)00060-5