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Review of micromachining of ceramics by etching:
TING, H.T.
;
ABOU-EL-HOSSEIN, K.A.
;
CHUA, H.B.
Transactions of Nonferrous Metals Society of China. 19 (2009) - p. s1-s16 , 2009
Link:
https://doi.org/10.1016/s1003-6326(10)60237-3
RT Journal T1 <Title>Review of micromachining of ceramics by etching</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1003-6326(10)60237-3&Exemplar=1&LAN=DE A1 TING, H.T. A1 ABOU-EL-HOSSEIN, K.A. A1 CHUA, H.B. PB Elsevier BV YR 2009 SN 1003-6326 JF Transactions of Nonferrous Metals Society of China VO 19 SP s1 OP s16 LK http://dx.doi.org/https://doi.org/10.1016/s1003-6326(10)60237-3 DO https://doi.org/10.1016/s1003-6326(10)60237-3 SF ELIB - SuUB Bremen
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