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Fabrication of curved micro structures on photoresist layer:
YOON, Jae Sung
;
JE, Tae-Jin
;
CHOI, Doo-Sun
..
Transactions of Nonferrous Metals Society of China. 21 (2011) - p. s100-s103 , 2011
Link:
https://doi.org/10.1016/s1003-6326(11)61070-4
RT Journal T1 <Title>Fabrication of curved micro structures on photoresist layer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1003-6326(11)61070-4&Exemplar=1&LAN=DE A1 YOON, Jae Sung A1 JE, Tae-Jin A1 CHOI, Doo-Sun A1 CHANG, Sung Hwan A1 WHANG, Kyung-Hyun PB Elsevier BV YR 2011 SN 1003-6326 JF Transactions of Nonferrous Metals Society of China VO 21 SP s100 OP s103 LK http://dx.doi.org/https://doi.org/10.1016/s1003-6326(11)61070-4 DO https://doi.org/10.1016/s1003-6326(11)61070-4 SF ELIB - SuUB Bremen
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