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Effects of Al and N plasma immersion ion implantation on su..:

AN, Quan-zhang ; FENG, Kai ; LÜ, He-ping...
Transactions of Nonferrous Metals Society of China.  25 (2015)  6 - p. 1944-1949 , 2015
Link: https://doi.org/10.1016/s1003-6326(15)63802-x