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1 Ergebnisse
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Microstructure and residual stress of TiN films deposited a..:
MEI, Hai-juan
;
ZHAO, Sheng-sheng
;
CHEN, Wei
..
Transactions of Nonferrous Metals Society of China. 28 (2018) 7 - p. 1368-1376 , 2018
Link:
https://doi.org/10.1016/s1003-6326(18)64775-2
RT Journal T1 <Title>Microstructure and residual stress of TiN films deposited at low temperature by arc ion plating</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1003-6326(18)64775-2&Exemplar=1&LAN=DE A1 MEI, Hai-juan A1 ZHAO, Sheng-sheng A1 CHEN, Wei A1 WANG, Qi-min A1 LIANG, Hai-feng PB Elsevier BV YR 2018 SN 1003-6326 JF Transactions of Nonferrous Metals Society of China VO 28 IS 7 SP 1368 OP 1376 LK http://dx.doi.org/https://doi.org/10.1016/s1003-6326(18)64775-2 DO https://doi.org/10.1016/s1003-6326(18)64775-2 SF ELIB - SuUB Bremen
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