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1 Ergebnisse
1
CARL–advantages of thin-film imaging for leading-edge litho..:
Richter, E.
;
Sebald, M.
;
Chen, L.
..
Materials Science in Semiconductor Processing. 5 (2002) 2-3 - p. 291-299 , 2002
Link:
https://doi.org/10.1016/s1369-8001(02)00107-5
RT Journal T1 <Title>CARL–advantages of thin-film imaging for leading-edge lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1369-8001(02)00107-5&Exemplar=1&LAN=DE A1 Richter, E. A1 Sebald, M. A1 Chen, L. A1 Schmid, G. A1 Czech, G. PB Elsevier BV YR 2002 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 5 IS 2-3 SP 291 OP 299 LK http://dx.doi.org/https://doi.org/10.1016/s1369-8001(02)00107-5 DO https://doi.org/10.1016/s1369-8001(02)00107-5 SF ELIB - SuUB Bremen
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