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1 Ergebnisse
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Photoelastic stress evaluation and defect monitoring in 300..:
Geiler, H.D
;
Wagner, M
;
Karge, H
..
Materials Science in Semiconductor Processing. 5 (2002) 4-5 - p. 445-455 , 2002
Link:
https://doi.org/10.1016/s1369-8001(02)00138-5
RT Journal T1 <Title>Photoelastic stress evaluation and defect monitoring in 300-mm-wafer manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1369-8001(02)00138-5&Exemplar=1&LAN=DE A1 Geiler, H.D A1 Wagner, M A1 Karge, H A1 Paulsen, M A1 Schmolke, R PB Elsevier BV YR 2002 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 5 IS 4-5 SP 445 OP 455 LK http://dx.doi.org/https://doi.org/10.1016/s1369-8001(02)00138-5 DO https://doi.org/10.1016/s1369-8001(02)00138-5 SF ELIB - SuUB Bremen
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