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A roadmap towards cost efficient 300mm equipment:
Pfitzner, Lothar
;
Kücher, Peter
Materials Science in Semiconductor Processing. 5 (2002) 4-5 - p. 321-331 , 2002
Link:
https://doi.org/10.1016/s1369-8001(03)00010-6
RT Journal T1 <Title>A roadmap towards cost efficient 300mm equipment</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1369-8001(03)00010-6&Exemplar=1&LAN=DE A1 Pfitzner, Lothar A1 Kücher, Peter PB Elsevier BV YR 2002 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 5 IS 4-5 SP 321 OP 331 LK http://dx.doi.org/https://doi.org/10.1016/s1369-8001(03)00010-6 DO https://doi.org/10.1016/s1369-8001(03)00010-6 SF ELIB - SuUB Bremen
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