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1 Ergebnisse
1
Incidence angle distributions of ions bombarding grounded s..:
Aydil, E.S
;
Quiniou, B.O.M
;
Lee, J.T.C
..
Materials Science in Semiconductor Processing. 1 (1998) 1 - p. 75-82 , 1998
Link:
https://doi.org/10.1016/s1369-8001(98)00003-1
RT Journal T1 <Title>Incidence angle distributions of ions bombarding grounded surfaces in high density plasma reactors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1369-8001(98)00003-1&Exemplar=1&LAN=DE A1 Aydil, E.S A1 Quiniou, B.O.M A1 Lee, J.T.C A1 Gregus, J.A A1 Gottscho, R.A PB Elsevier BV YR 1998 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 1 IS 1 SP 75 OP 82 LK http://dx.doi.org/https://doi.org/10.1016/s1369-8001(98)00003-1 DO https://doi.org/10.1016/s1369-8001(98)00003-1 SF ELIB - SuUB Bremen
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