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1 Ergebnisse
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Influence of vapor phase pre-oxide-cleaning on the oxidatio..:
Froeschle, B
;
Sacher, N
;
Glowacki, F
.
Materials Science in Semiconductor Processing. 1 (1998) 3-4 - p. 271-274 , 1998
Link:
https://doi.org/10.1016/s1369-8001(98)00040-7
RT Journal T1 <Title>Influence of vapor phase pre-oxide-cleaning on the oxidation characteristics</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1369-8001(98)00040-7&Exemplar=1&LAN=DE A1 Froeschle, B A1 Sacher, N A1 Glowacki, F A1 Theiler, T PB Elsevier BV YR 1998 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 1 IS 3-4 SP 271 OP 274 LK http://dx.doi.org/https://doi.org/10.1016/s1369-8001(98)00040-7 DO https://doi.org/10.1016/s1369-8001(98)00040-7 SF ELIB - SuUB Bremen
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