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1 Ergebnisse
1
Coupled simulation of gas flow and heat transfer in an RTP-..:
Poscher, S.
;
Theiler, T.
Materials Science in Semiconductor Processing. 1 (1998) 3-4 - p. 201-205 , 1998
Link:
https://doi.org/10.1016/s1369-8001(98)00044-4
RT Journal T1 <Title>Coupled simulation of gas flow and heat transfer in an RTP-system with rotating wafer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s1369-8001(98)00044-4&Exemplar=1&LAN=DE A1 Poscher, S. A1 Theiler, T. PB Elsevier BV YR 1998 SN 1369-8001 JF Materials Science in Semiconductor Processing VO 1 IS 3-4 SP 201 OP 205 LK http://dx.doi.org/https://doi.org/10.1016/s1369-8001(98)00044-4 DO https://doi.org/10.1016/s1369-8001(98)00044-4 SF ELIB - SuUB Bremen
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