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HfOxFy Based ISFETs with Reactive Fluorine Doping for K+ io..:

Yang, Chia-Ming ; Lu, Tseng-Fu ; Ho, Kuan-I...
International Journal of Electrochemical Science.  9 (2014)  12 - p. 7069-7082 , 2014
Link: https://doi.org/10.1016/s1452-3981(23)10952-7