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Chapter 6 Micro/Nanolithography Using Self-Assembled Monola..:

, In: Interface Science and Technology; Advanced Chemistry of Monolayers at Interfaces - Trends in Methodology and Technology,
Takai, O. ; Hayashi, K. - p. 141-175 , 2007
Link: https://doi.org/10.1016/s1573-4285(06)14006-5