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1 Ergebnisse
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In SEM a New Method for Nondestructive Internal Microtomogr..:
Liang, Zhuguan
;
Xia, Ling
;
Li, Yawen
...
Microscopy and Microanalysis. 7 (2001) S2 - p. 488-489 , 2001
Link:
https://doi.org/10.1017/s1431927600028518
RT Journal T1
In SEM a New Method for Nondestructive Internal Microtomography of Semiconductors and IC
UL https://suche.suub.uni-bremen.de/peid=cr-10.1017_s1431927600028518&Exemplar=1&LAN=DE A1 Liang, Zhuguan A1 Xia, Ling A1 Li, Yawen A1 Wang, Jian A1 Zhou, Kailin A1 Li, Ping A1 Xu, Xiaohua A1 Rau, E.I. A1 Hu, Wenguo PB Oxford University Press (OUP) YR 2001 SN 1431-9276 SN 1435-8115 JF Microscopy and Microanalysis VO 7 IS S2 SP 488 OP 489 LK http://dx.doi.org/https://doi.org/10.1017/s1431927600028518 DO https://doi.org/10.1017/s1431927600028518 SF ELIB - SuUB Bremen
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