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1 Ergebnisse
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Characterization of Ultra-Thin Hf-based Alternative Dielect..:
Agustin, Melody P
;
Foran, Brendan
;
Bersuker, Gennadi
..
Microscopy and Microanalysis. 10 (2004) S02 - p. 322-323 , 2004
Link:
https://doi.org/10.1017/s1431927604886525
RT Journal T1
Characterization of Ultra-Thin Hf-based Alternative Dielectric Layers for Si CMOS by Z-contrast Imaging and Electron Energy-Loss Spectroscopy in STEM
UL https://suche.suub.uni-bremen.de/peid=cr-10.1017_s1431927604886525&Exemplar=1&LAN=DE A1 Agustin, Melody P A1 Foran, Brendan A1 Bersuker, Gennadi A1 Barnett, Joel A1 Stemmer, Susanne PB Oxford University Press (OUP) YR 2004 SN 1431-9276 SN 1435-8115 JF Microscopy and Microanalysis VO 10 IS S02 SP 322 OP 323 LK http://dx.doi.org/https://doi.org/10.1017/s1431927604886525 DO https://doi.org/10.1017/s1431927604886525 SF ELIB - SuUB Bremen
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