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1 Ergebnisse
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Quantitative Electron Energy Loss Spectroscopy (EELS) Analy..:
Li, J.
;
Bruley, J.
;
Conti, R.
...
Microscopy and Microanalysis. 23 (2017) S1 - p. 1462-1463 , 2017
Link:
https://doi.org/10.1017/s1431927617007978
RT Journal T1 <Title>Quantitative Electron Energy Loss Spectroscopy (EELS) Analysis of Flowable CVD Oxide for Shallow Trench Isolation of finFET Integration</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1017_s1431927617007978&Exemplar=1&LAN=DE A1 Li, J. A1 Bruley, J. A1 Conti, R. A1 Belyansky, M. A1 Metha, S. A1 Strane, J. A1 Tai, L. A1 Jiang, L. A1 Demarest, J. A1 Gaudiello, J. A1 Zhu, Y. A1 Grill, A. PB Oxford University Press (OUP) YR 2017 SN 1431-9276 SN 1435-8115 JF Microscopy and Microanalysis VO 23 IS S1 SP 1462 OP 1463 LK http://dx.doi.org/https://doi.org/10.1017/s1431927617007978 DO https://doi.org/10.1017/s1431927617007978 SF ELIB - SuUB Bremen
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