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1 Ergebnisse
1
First-Principles Calculation Guided High-Purity Layer Contr..:
Kim, Changmin
;
Kim, Muyoung
;
Cho, Donghyun
...
Chemistry of Materials. 35 (2023) 3 - p. 1016-1028 , 2023
Link:
https://doi.org/10.1021/acs.chemmater.2c02914
RT Journal T1
First-Principles Calculation Guided High-Purity Layer Control of 4 in. MoS2 by Plasma RIE
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.chemmater.2c02914&Exemplar=1&LAN=DE A1 Kim, Changmin A1 Kim, Muyoung A1 Cho, Donghyun A1 Kanade, Chaitanya Kaluram A1 Seok, Hyunho A1 Bak, Moon Soo A1 Kim, Daewoong A1 Kang, Woo Seok A1 Kim, Taesung A1 Kim, Hyeong-U PB American Chemical Society (ACS) YR 2023 SN 0897-4756 SN 1520-5002 JF Chemistry of Materials VO 35 IS 3 SP 1016 OP 1028 LK http://dx.doi.org/https://doi.org/10.1021/acs.chemmater.2c02914 DO https://doi.org/10.1021/acs.chemmater.2c02914 SF ELIB - SuUB Bremen
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