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1 Ergebnisse
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Combined Ligand Exchange and Substitution Reactions in Atom..:
Eom, Taeyong
;
Gwon, Taehong
;
Yoo, Sijung
...
Chemistry of Materials. 27 (2015) 10 - p. 3707-3713 , 2015
Link:
https://doi.org/10.1021/acs.chemmater.5b00805
RT Journal T1
Combined Ligand Exchange and Substitution Reactions in Atomic Layer Deposition of Conformal Ge2Sb2Te5 Film for Phase Change Memory Application
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.chemmater.5b00805&Exemplar=1&LAN=DE A1 Eom, Taeyong A1 Gwon, Taehong A1 Yoo, Sijung A1 Choi, Byung Joon A1 Kim, Moo-Sung A1 Buchanan, Iain A1 Ivanov, Sergei A1 Xiao, Manchao A1 Hwang, Cheol Seong PB American Chemical Society (ACS) YR 2015 SN 0897-4756 SN 1520-5002 JF Chemistry of Materials VO 27 IS 10 SP 3707 OP 3713 LK http://dx.doi.org/https://doi.org/10.1021/acs.chemmater.5b00805 DO https://doi.org/10.1021/acs.chemmater.5b00805 SF ELIB - SuUB Bremen
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