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1 Ergebnisse
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Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 St..:
Mione, M. A.
;
Vandalon, V.
;
Mameli, A.
..
The Journal of Physical Chemistry C. 125 (2021) 45 - p. 24945-24957 , 2021
Link:
https://doi.org/10.1021/acs.jpcc.1c07980
RT Journal T1 <Title>Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.jpcc.1c07980&Exemplar=1&LAN=DE A1 Mione, M. A. A1 Vandalon, V. A1 Mameli, A. A1 Kessels, W. M. M. A1 Roozeboom, F. PB American Chemical Society (ACS) YR 2021 SN 1932-7447 SN 1932-7455 JF The Journal of Physical Chemistry C VO 125 IS 45 SP 24945 OP 24957 LK http://dx.doi.org/https://doi.org/10.1021/acs.jpcc.1c07980 DO https://doi.org/10.1021/acs.jpcc.1c07980 SF ELIB - SuUB Bremen
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