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1 Ergebnisse
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Real-Time In Situ Parallel Detection of Elements and Molecu..:
Priebe, Agnieszka
;
Dousse, Bryan
;
Tzou, Chia-Yu
...
The Journal of Physical Chemistry C. 126 (2022) 4 - p. 1901-1912 , 2022
Link:
https://doi.org/10.1021/acs.jpcc.1c09544
RT Journal T1
Real-Time In Situ Parallel Detection of Elements and Molecules with TOFMS during ALD for Chemical Quality Control of Thin Films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.jpcc.1c09544&Exemplar=1&LAN=DE A1 Priebe, Agnieszka A1 Dousse, Bryan A1 Tzou, Chia-Yu A1 Papadopoulos, Georgios A1 Utke, Ivo A1 Bensaoula, Abdelhak A1 Michler, Johann A1 Guerra-Nuñez, Carlos PB American Chemical Society (ACS) YR 2022 SN 1932-7447 SN 1932-7455 JF The Journal of Physical Chemistry C VO 126 IS 4 SP 1901 OP 1912 LK http://dx.doi.org/https://doi.org/10.1021/acs.jpcc.1c09544 DO https://doi.org/10.1021/acs.jpcc.1c09544 SF ELIB - SuUB Bremen
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