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Role of Cyclopentadienyl Ligands of Group 4 Precursors towa..:
Ngoc Van, Tran Thi
;
Jang, Donghak
;
Jung, Eunae
...
The Journal of Physical Chemistry C. 126 (2022) 42 - p. 18090-18099 , 2022
Link:
https://doi.org/10.1021/acs.jpcc.2c04425
RT Journal T1 <Title>Role of Cyclopentadienyl Ligands of Group 4 Precursors toward High-Temperature Atomic Layer Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.jpcc.2c04425&Exemplar=1&LAN=DE A1 Ngoc Van, Tran Thi A1 Jang, Donghak A1 Jung, Eunae A1 Noh, Hyunsik A1 Moon, Jiwon A1 Kil, Deok-Sin A1 Chung, Sung-Woong A1 Shong, Bonggeun PB American Chemical Society (ACS) YR 2022 SN 1932-7447 SN 1932-7455 JF The Journal of Physical Chemistry C VO 126 IS 42 SP 18090 OP 18099 LK http://dx.doi.org/https://doi.org/10.1021/acs.jpcc.2c04425 DO https://doi.org/10.1021/acs.jpcc.2c04425 SF ELIB - SuUB Bremen
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