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1 Ergebnisse
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Nucleation Delay in Selective Atomic Layer Deposition: Dens..:
Wen, Yanwei
;
Lan, Yuxiao
;
Li, Haojie
...
The Journal of Physical Chemistry C. 128 (2024) 24 - p. 9915-9925 , 2024
Link:
https://doi.org/10.1021/acs.jpcc.4c01512
RT Journal T1 <Title>Nucleation Delay in Selective Atomic Layer Deposition: Density Functional Insights Coupled Numerical Nucleation Model</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.jpcc.4c01512&Exemplar=1&LAN=DE A1 Wen, Yanwei A1 Lan, Yuxiao A1 Li, Haojie A1 Li, Yicheng A1 Cao, Kun A1 Wu, Feifeng A1 Chen, Rong A1 Shan, Bin PB American Chemical Society (ACS) YR 2024 SN 1932-7447 SN 1932-7455 JF The Journal of Physical Chemistry C VO 128 IS 24 SP 9915 OP 9925 LK http://dx.doi.org/https://doi.org/10.1021/acs.jpcc.4c01512 DO https://doi.org/10.1021/acs.jpcc.4c01512 SF ELIB - SuUB Bremen
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