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1 Ergebnisse
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Growth Enhancement and Nitrogen Loss in ZnOxNy Low-Temperat..:
Kim, Soo Hyun
;
Pyeon, Jung Joon
;
Lee, Woo Chul
...
The Journal of Physical Chemistry C. 119 (2015) 41 - p. 23470-23477 , 2015
Link:
https://doi.org/10.1021/acs.jpcc.5b06488
RT Journal T1 <Title>Growth Enhancement and Nitrogen Loss in ZnOxNy Low-Temperature Atomic Layer Deposition with NH3</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.jpcc.5b06488&Exemplar=1&LAN=DE A1 Kim, Soo Hyun A1 Pyeon, Jung Joon A1 Lee, Woo Chul A1 Jeong, Doo Seok A1 Baek, Seung-Hyub A1 Kim, Jin-Sang A1 Kim, Seong Keun PB American Chemical Society (ACS) YR 2015 SN 1932-7447 SN 1932-7455 JF The Journal of Physical Chemistry C VO 119 IS 41 SP 23470 OP 23477 LK http://dx.doi.org/https://doi.org/10.1021/acs.jpcc.5b06488 DO https://doi.org/10.1021/acs.jpcc.5b06488 SF ELIB - SuUB Bremen
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