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1 Ergebnisse
1
Silicon Chemistry in Fluorinated Chemical Vapor Deposition ..:
Stenberg, Pontus
;
Sukkaew, Pitsiri
;
Farkas, Ildiko
...
The Journal of Physical Chemistry C. 121 (2017) 5 - p. 2711-2720 , 2017
Link:
https://doi.org/10.1021/acs.jpcc.6b10849
RT Journal T1
Silicon Chemistry in Fluorinated Chemical Vapor Deposition of Silicon Carbide
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.jpcc.6b10849&Exemplar=1&LAN=DE A1 Stenberg, Pontus A1 Sukkaew, Pitsiri A1 Farkas, Ildiko A1 Kordina, Olof A1 Janzén, Erik A1 Ojamäe, Lars A1 Danielsson, Örjan A1 Pedersen, Henrik PB American Chemical Society (ACS) YR 2017 SN 1932-7447 SN 1932-7455 JF The Journal of Physical Chemistry C VO 121 IS 5 SP 2711 OP 2720 LK http://dx.doi.org/https://doi.org/10.1021/acs.jpcc.6b10849 DO https://doi.org/10.1021/acs.jpcc.6b10849 SF ELIB - SuUB Bremen
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