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1 Ergebnisse
1
Healing Ion-Implanted Semiconductors by Hybrid Microwave An..:
Zhang, Hemin
;
Ahn, Chang Won
;
Park, Jin Yong
...
The Journal of Physical Chemistry Letters. 13 (2022) 17 - p. 3878-3885 , 2022
Link:
https://doi.org/10.1021/acs.jpclett.2c00220
RT Journal T1
Healing Ion-Implanted Semiconductors by Hybrid Microwave Annealing: Activation of Nitrogen-Implanted TiO2
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acs.jpclett.2c00220&Exemplar=1&LAN=DE A1 Zhang, Hemin A1 Ahn, Chang Won A1 Park, Jin Yong A1 Ok, Jung-Woo A1 Sung, Ji Yeong A1 Jin, Jong Sung A1 Kim, Hyun Gyu A1 Lee, Jae Sung PB American Chemical Society (ACS) YR 2022 SN 1948-7185 SN 1948-7185 JF The Journal of Physical Chemistry Letters VO 13 IS 17 SP 3878 OP 3885 LK http://dx.doi.org/https://doi.org/10.1021/acs.jpclett.2c00220 DO https://doi.org/10.1021/acs.jpclett.2c00220 SF ELIB - SuUB Bremen
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